Short pulse laser micro/nano manufacturing: Fundamentals and applications

Lan Jiang, Xin Li, Xi Peng Zhang, Qiang Hua Chen, Hai Lung Tsai, Yong Feng Lu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.

Original languageEnglish (US)
Pages (from-to)126-142
Number of pages17
JournalInternational Journal of Nanomanufacturing
Issue number2
StatePublished - Jun 2011


  • Laser direct-writing manufacturing
  • Laser interference manufacturing
  • Laser materials interaction
  • Laser near-field manufacturing

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering


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