Silicide formation and structural evolution in Fe-, Co-, and Ni-implanted silicon

Zhengquan Tan, F. Namavar, J. I. Budnick, F. H. Sanchez, A. Fasihuddin, S. M. Heald, C. E. Bouldin, J. C. Woicik

Research output: Contribution to journalArticle

31 Scopus citations

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Physics & Astronomy