Silicon optical waveguides with buried-CoSi2 cladding layers

R. A. Soref, F. Namavar, N. M. Kalkhoran, D. M. Koker

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.

Original languageEnglish (US)
Pages (from-to)1319-1321
Number of pages3
JournalOptics Letters
Issue number17
StatePublished - Sep 1994
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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