Silicon optical waveguides with buried-CoSi2 cladding layers

R. A. Soref; F. Namavar; N. M. Kalkhoran; D. M. Koker

doi:10.1364/OL.19.001319

Silicon optical waveguides with buried-CoSi2 cladding layers

R. A. Soref, F. Namavar, N. M. Kalkhoran, D. M. Koker

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi₂ formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE₀ and TM₀. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi₂ cladding layers.

Original language	English (US)
Pages (from-to)	1319-1321
Number of pages	3
Journal	Optics Letters
Volume	19
Issue number	17
DOIs	https://doi.org/10.1364/OL.19.001319
State	Published - Sep 1994
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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title = "Silicon optical waveguides with buried-CoSi2 cladding layers",

abstract = "We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.",

author = "Soref, {R. A.} and F. Namavar and Kalkhoran, {N. M.} and Koker, {D. M.}",

year = "1994",

month = sep,

doi = "10.1364/OL.19.001319",

language = "English (US)",

volume = "19",

pages = "1319--1321",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "The Optical Society",

number = "17",

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TY - JOUR

T1 - Silicon optical waveguides with buried-CoSi2 cladding layers

AU - Soref, R. A.

AU - Namavar, F.

AU - Kalkhoran, N. M.

AU - Koker, D. M.

PY - 1994/9

Y1 - 1994/9

N2 - We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.

AB - We report a new Si waveguide that has a buried, metallike cladding. Infrared light propagates in a crystal Si layer atop a 50-nm film of buried CoSi2 formed by implantation. Experiments in a 20-μm Si structure at the 1.3-μm wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two vertically integrated Si slab waveguides bounded below by CoSi2 cladding layers.

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U2 - 10.1364/OL.19.001319

DO - 10.1364/OL.19.001319

M3 - Article

AN - SCOPUS:0028515177

SN - 0146-9592

VL - 19

SP - 1319

EP - 1321

JO - Optics Letters

JF - Optics Letters

IS - 17

ER -

Silicon optical waveguides with buried-CoSi2 cladding layers

Abstract

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