Abstract
This paper reviews the present status of spectroscopic ellipsometry (SE) as a metrology tool in production of optical coatings. Spectroscopic ellipsometry is often used to determine optical constants and layer thickness for single or multilayered stacks. Both ex situ and in situ SE results will be discussed. Ex situ SE has been used for optical coatings for many years, and is still an important characterization tool. A greatly expanded spectral range is now available, including vacuum-ultraviolet to the far infrared. In situ SE generally covers a narrower spectral range; however data acquisition can include hundreds of wavelengths simultaneously in less than a second. This allows closed-loop feedback process control and large area mapping of material properties on a short time scale.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 295-300 |
| Number of pages | 6 |
| Journal | Proceedings, Annual Technical Conference - Society of Vacuum Coaters |
| State | Published - 2001 |
| Event | 44th Annual Technical Conference Prodeedings - Philadelphia, PA, United States Duration: Apr 21 2001 → Apr 26 2001 |
Keywords
- Coating thickness
- Optical constants
- Process control
- Spectroscopic ellipsometry
ASJC Scopus subject areas
- Mechanical Engineering
- Surfaces and Interfaces
- Fluid Flow and Transfer Processes
- Surfaces, Coatings and Films