Spectroscopic ellipsometry studies of indium tin oxide and other flat panel display multilayer materials

John A. Woollam, W. A. McGaham, B. Johs

Research output: Contribution to journalArticle

53 Scopus citations

Abstract

Variable angle of incidence spectroscopic ellipsometry (VASE®)* * VASE® is a Registered Trademark (USA) of the J.A. Woollam Co., Inc. is a rapid and powerful non-destructive optical technique often used to characterize thin films and multilayered structures. A monochromatic, linearly polarized beam of light is reflected from a sample surface at a known angle of incidence, and the resulting polarization state of the reflected beam is measured as a function of wavelength and angle of incidence. Acquired data are then used to determine the optical constants, film thicknesses, and other parameters in the assumed model for the sample. The VASE® experiment is particularly useful for the characterization of materials for flat panel displays. In the present work, we demonstrate the use of VASE® on several specific materials for display applications: conducting indium tin oxide (ITO), hydrogenated amorphous silicon, and silicon dioxide, all deposited onto glass substrates.

Original languageEnglish (US)
Pages (from-to)44-46
Number of pages3
JournalThin Solid Films
Volume241
Issue number1-2
DOIs
StatePublished - Apr 1 1994

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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