Multiple‐wavelength‐angle‐of‐incidence null ellipsometry, together with the effective medium approximation, are used to evaluate both the composition and the geometrical structure of an insulating film made of silicon nitride and silicon oxide on a GaAs substrate. The results are found to be in good agreement with AES measurements on the same film.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics