Abstract
In situ spectroscopic ellipsometry (SE) has been successfully used to accurately measure sputter deposition rates and optical constants of un-oxidized metal layers and to control the growth of magnetic multilayers. The structures include [Co/Cu]n, [Co/Au]n, [Co/Ni]n, [Co/Pd]n and [Co/Pd/ Au]n. Layer thickness precision is better than ±0.05 nm for layer thicknesses in the range of 0.2 nm to 10 nm. Closed-loop feedback control of layer thickness is also demonstrated. Good consistency was obtained by comparing the in situ SE results to x-ray diffraction measurements. Dynamic oxidation studies of [Co/Au]n and [Co/Ni]n multilayer structures are also presented.
Original language | English (US) |
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Pages (from-to) | 429-435 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 16 |
Issue number | 2 |
DOIs | |
State | Published - 1998 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films