Study of 3D micro-ultrasonic machining

Engineering

• Ultrasonics 100%
• Electric Discharge Machining 66%
• Electrical Discharge 66%
• Microscale 33%
• Experimental Result 33%
• Computer Aided Manufacturing 33%
• Computer Aided Design 33%
• Brittle Material 33%
• Manufacturing Process 33%
• Microelectromechanical System 33%
• Lithography 33%
• Machining Accuracy 33%
• Mesoscale 33%
• Quartz Crystal 33%

Material Science

• Machining 100%
• Electrical Discharge Machining 40%
• Silicon 20%
• Electrochemical Machining 20%
• Brittleness 20%
• Microelectromechanical System 20%
• Lithography 20%

Keyphrases

• Quartz Ceramic 33%
• Silicon-on-glass 33%
• Vibration Process 33%