STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY.

P. G. Snyder; A. Massengale; K. Memarzadeh; J. A. Woollam; D. C. Ingram; P. P. Pronko

STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY.

P. G. Snyder, A. Massengale, K. Memarzadeh, J. A. Woollam, D. C. Ingram, P. P. Pronko

Electrical & Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

Implantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the near-surface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 multiplied by 10**1**5cm** minus **2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Editors	Michael O. Thompson, S.Thomas Picraux, James S. Williams
Publisher	Materials Research Soc
Pages	535-540
Number of pages	6
ISBN (Print)	0931837405
State	Published - 1987
Event	Beam-Solid Interact and Transient Processes - Boston, MA, USA Duration: Dec 1 1986 → Dec 4 1986

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	74
ISSN (Print)	0272-9172

Other

Other	Beam-Solid Interact and Transient Processes
City	Boston, MA, USA
Period	12/1/86 → 12/4/86

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Snyder, P. G., Massengale, A., Memarzadeh, K., Woollam, J. A., Ingram, D. C., & Pronko, P. P. (1987). STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. In M. O. Thompson, S. T. Picraux, & J. S. Williams (Eds.), Materials Research Society Symposia Proceedings (pp. 535-540). (Materials Research Society Symposia Proceedings; Vol. 74). Materials Research Soc.

STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. / Snyder, P. G.; Massengale, A.; Memarzadeh, K.; Woollam, J. A.; Ingram, D. C.; Pronko, P. P.

Materials Research Society Symposia Proceedings. ed. / Michael O. Thompson; S.Thomas Picraux; James S. Williams. Materials Research Soc, 1987. p. 535-540 (Materials Research Society Symposia Proceedings; Vol. 74).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Snyder, PG, Massengale, A, Memarzadeh, K, Woollam, JA, Ingram, DC & Pronko, PP 1987, STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. in MO Thompson, ST Picraux & JS Williams (eds), Materials Research Society Symposia Proceedings. Materials Research Society Symposia Proceedings, vol. 74, Materials Research Soc, pp. 535-540, Beam-Solid Interact and Transient Processes, Boston, MA, USA, 12/1/86.

Snyder, P. G. ; Massengale, A. ; Memarzadeh, K. ; Woollam, J. A. ; Ingram, D. C. ; Pronko, P. P. / STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY. Materials Research Society Symposia Proceedings. editor / Michael O. Thompson ; S.Thomas Picraux ; James S. Williams. Materials Research Soc, 1987. pp. 535-540 (Materials Research Society Symposia Proceedings).

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abstract = "Implantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the near-surface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 multiplied by 10**1**5cm** minus **2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.",

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AB - Implantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the near-surface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 multiplied by 10**1**5cm** minus **2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.

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