TY - GEN
T1 - Study of micro ultrasonic machining of silicon
AU - Yu, Z.
AU - Hu, X.
AU - Rajurkar, K. P.
PY - 2005
Y1 - 2005
N2 - As a micro mechanical machining process, micro ultrasonic machining (micro USM) has the major advantage of producing micro-scale components or features in brittle (glass, quartz crystal, and sapphire) and hard (ceramics) materials. Micro USM is used to generate micro holes with 5μm in diameter and 3D micro cavities. However, the relationship of machining parameters such as static load, abrasive particle and amplitude of vibration and the material removal rate is not clearly understood. In this paper, a mathematical model is developed to describe the material removal process in micro USM. Experiments were carried out to verify the model. It was found that the machining speed decreases when the load is over a certain value, which is different from that of theoretical model. To understand this phenomenon, a simple model was proposed to analyze it qualitatively. It was found that the debris accumulation around the crater in a short time is the main reason resulting in the low machining efficiency.
AB - As a micro mechanical machining process, micro ultrasonic machining (micro USM) has the major advantage of producing micro-scale components or features in brittle (glass, quartz crystal, and sapphire) and hard (ceramics) materials. Micro USM is used to generate micro holes with 5μm in diameter and 3D micro cavities. However, the relationship of machining parameters such as static load, abrasive particle and amplitude of vibration and the material removal rate is not clearly understood. In this paper, a mathematical model is developed to describe the material removal process in micro USM. Experiments were carried out to verify the model. It was found that the machining speed decreases when the load is over a certain value, which is different from that of theoretical model. To understand this phenomenon, a simple model was proposed to analyze it qualitatively. It was found that the debris accumulation around the crater in a short time is the main reason resulting in the low machining efficiency.
KW - Debris Accumulation
KW - Material Removal
KW - Micro USM
UR - http://www.scopus.com/inward/record.url?scp=33646006692&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33646006692&partnerID=8YFLogxK
U2 - 10.1115/IMECE2005-79244
DO - 10.1115/IMECE2005-79244
M3 - Conference contribution
AN - SCOPUS:33646006692
SN - 0791842231
SN - 9780791842232
T3 - American Society of Mechanical Engineers, Manufacturing Engineering Division, MED
SP - 1063
EP - 1070
BT - American Society of Mechanical Engineers, Manufacturing Engineering Division, MED
T2 - 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -