STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si.

F. Namavar, J. I. Budnick, H. C. Hayden, F. A. Otter, Y. Patarini

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	North-Holland
Pages	341-346
Number of pages	6
ISBN (Print)	0444008691
State	Published - 1984

Name	Materials Research Society Symposia Proceedings
Volume	27
ISSN (Print)	0272-9172

ASJC Scopus subject areas

STUDY OF NEAR SURFACE STRUCTURE AND COMPOSITION FOR HIGH DOSE IMPLANTATION OF Cr** plus INTO Si. / Namavar, F.; Budnick, J. I.; Hayden, H. C. et al.
Materials Research Society Symposia Proceedings. North-Holland, 1984. p. 341-346 (Materials Research Society Symposia Proceedings; Vol. 27).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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author = "F. Namavar and Budnick, {J. I.} and Hayden, {H. C.} and Otter, {F. A.} and Y. Patarini",

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AU - Otter, F. A.

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