Study of Ta 2O 5 for use as high temperature piezoelectric sensors

B. R. Jooste, H. J. Viljoen

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Acoustic sensors which can function at high temperatures have important potential uses. In this work we report on the deposition, characterization and qualitative assessment of piezoelectric behaviour of orthorhombic Ta 2O 5. It is shown that orthorhombic Ta 2O 5 belongs to the class 2 mm. XRD analysis of films annealed for 1 min., 10 min. and 1 hr at 800 °C and 900 °C reveal the formation of (0 0 1), (1 10 0) and (1 11 0) orientations at 800 °C, but the (1 10 0) increases at the expense of the other two as the annealing period is extended. At 900 °C the dominant orientations are (1 10 0) and (2 9 0). The piezoelectric effect is significantly stronger after annealing and the stronger piezoelectric effect does not correlate with the presence of (1 10 0) and (2 9 0) so much as with the absence of (0 0 1) and (1 11 0).

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsE.P. George, R. Gotthardt, K. Otsuka, S. Trolier-McKinstry, M. Wun-Fogle
PublisherMaterials Research Society
Number of pages6
StatePublished - 1997
EventProceedings of the 1996 MRS Fall Symposium - Boston, MA, USA
Duration: Dec 2 1996Dec 5 1996


OtherProceedings of the 1996 MRS Fall Symposium
CityBoston, MA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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