TY - GEN
T1 - Substrate effect on single carbon nanotube based infrared sensors
AU - Chen, Liangliang
AU - Xi, Ning
AU - Yang, Ruiguo
AU - Song, Bo
AU - Zhou, Zhanxin
AU - Sun, Zhiyong
PY - 2013
Y1 - 2013
N2 - Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.
AB - Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.
UR - http://www.scopus.com/inward/record.url?scp=84894169579&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84894169579&partnerID=8YFLogxK
U2 - 10.1109/NANO.2013.6720955
DO - 10.1109/NANO.2013.6720955
M3 - Conference contribution
AN - SCOPUS:84894169579
SN - 9781479906758
T3 - Proceedings of the IEEE Conference on Nanotechnology
SP - 250
EP - 253
BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Y2 - 5 August 2013 through 8 August 2013
ER -