Substrate effect on single carbon nanotube based infrared sensors

Liangliang Chen, Ning Xi, Ruiguo Yang, Bo Song, Zhanxin Zhou, Zhiyong Sun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Infrared (IR) sensors have been widely used for military and civil industry, while carbon nanotube (CNT) research progresses have been made in recent years. This led to investigation and development of CNT based IR detectors. In this paper, CNT-metal based Schottky barrier structure was designed to detect IR irradiance, and different interfacial layer, including SiO2, parylene-C, Si3N4, quartz, and polyimide, was used under CNT-metal contact to isolate substrate noise. The experimental results have shown that, the polymer based interfacial layer has strong substrate noise reduction on CNT IR sensor. The dark current is less than 0.3 nA under the condition of photocurrent 170 nA, noise at 0.5 nA when CNT-metal contact was fabricated on polyimide polymer due to substrate isolation and noise reduction.

Original languageEnglish (US)
Title of host publication2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages250-253
Number of pages4
DOIs
StatePublished - 2013
Event2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China
Duration: Aug 5 2013Aug 8 2013

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
CountryChina
CityBeijing
Period8/5/138/8/13

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

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  • Cite this

    Chen, L., Xi, N., Yang, R., Song, B., Zhou, Z., & Sun, Z. (2013). Substrate effect on single carbon nanotube based infrared sensors. In 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 (pp. 250-253). [6720955] (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2013.6720955