@article{92db2655c77748d2b1fae36864d5918c,
title = "Summary Abstract: Multiple-wavelength-angle-of-incidence ellipsometry: Application to silicon nitride-gallium arsenide structures",
author = "Bu-Abbud, {George H.} and Alterovitz, {Samuel A.} and Bashara, {N. M.} and Woollam, {John A.}",
year = "1983",
month = apr,
doi = "10.1116/1.572190",
language = "English (US)",
volume = "1",
pages = "619--620",
journal = "Journal of Vacuum Science and Technology A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}