Summary Abstract: Multiple-wavelength-angle-of-incidence ellipsometry: Application to silicon nitride-gallium arsenide structures

George H. Bu-Abbud, Samuel A. Alterovitz, N. M. Bashara, John A. Woollam

Research output: Contribution to journalArticlepeer-review

9 Scopus citations
Original languageEnglish (US)
Pages (from-to)619-620
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - Apr 1983

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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