Summary Abstract: Multiple-wavelength-angle-of-incidence ellipsometry: Application to silicon nitride-gallium arsenide structures

George H. Bu-Abbud; Samuel A. Alterovitz; N. M. Bashara; John A. Woollam

doi:10.1116/1.572190

Summary Abstract: Multiple-wavelength-angle-of-incidence ellipsometry: Application to silicon nitride-gallium arsenide structures

George H. Bu-Abbud, Samuel A. Alterovitz, N. M. Bashara, John A. Woollam

Electrical & Computer Engineering

Research output: Contribution to journal › Article

9 Scopus citations

Original language	English (US)
Pages (from-to)	619-620
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	1
Issue number	2
DOIs	https://doi.org/10.1116/1.572190
State	Published - Apr 1983

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.572190

Cite this

Summary Abstract : Multiple-wavelength-angle-of-incidence ellipsometry: Application to silicon nitride-gallium arsenide structures. / Bu-Abbud, George H.; Alterovitz, Samuel A.; Bashara, N. M.; Woollam, John A.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 1, No. 2, 04.1983, p. 619-620.

Research output: Contribution to journal › Article

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