@article{920639ab64504bf8a94dbdece3185fee,
title = "Summary Abstract: Surface analysis of amorphous Ta-Cu thin films deposited on GaAs",
author = "Pouch, {J. J.} and Alterovitz, {S. A.} and Woollam, {J. A.} and Oh, {J. E.}",
year = "1988",
month = may,
doi = "10.1116/1.575045",
language = "English (US)",
volume = "6",
pages = "983--984",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}