Synthesis of carbon nanotubes by laser-assisted chemical vapor deposition

J. Shi, Y. F. Lu, X. W. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


With recent advances in the aligned growth of carbon nanotubes (CNTs), there are great interests in CNT-based field-emission and electronic applications. In conventional thermal chemical vapor deposition, substrates as well as chambers need to be globally heated to a sufficiently-high reaction temperature. In this paper, we report a method for direct synthesis of CNTs on pre-defined electrodes using laser-assisted chemical vapor deposition. A CW CO 2 laser (wavelength 10.6 μm, beam diameter 2 mm) was used to irradiate the pre-defined structures for CNT growth. The temperature of the substrate was measured by a pyrometer, ranging from 850-1000°C. By varying catalysts and laser parameters, carbon nanostructures including carbon nanofiber, multi-walled and single-walled CNTs can be controllably synthesized.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceLaser-based Micropackaging
Country/TerritoryUnited States
CitySan Jose, CA


  • CO laser
  • Carbon nanofiber
  • Carbon nanotube
  • Chemical vapor deposition
  • Laser-assisted deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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