@inproceedings{616da52004d34ecebb51aca3df704b49,
title = "Synthesis of graphene pattern using laser-induced chemical vapor deposition",
abstract = "In this study, Graphene patterns using laser-induced chemical vapor deposition (LCVD) with a visible CW laser (λ = 532 nm) irradiation at room temperature was investigated. Optically-pumped solid-state laser with a wavelength of 532 nm irradiates a thin nickel foil to induce a local temperature rise, thereby allowing the direct writing of graphene patterns about ∼10 μm in width with high growth rate on precisely controlled positions. It is demonstrate that the fabrication of graphene patterns can be achieved with a single scan for each graphene pattern using LCVD with no annealing or preprocessing of the substrate. The scan speed reaches to about ∼200 μm/s, which indicates that the graphene pattern with an unite area (10×10 μm) can be grown in 0.05 sec. The number of graphene layers was controlled by laser scan speed on a substrate. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for application of electrical circuits and devices.",
keywords = "Graphene, Graphene pattern, Laser-induced chemical vapor deposition",
author = "Jongbok Park and Swook Hann and Yongfeng Lu",
year = "2014",
doi = "10.1117/12.2038059",
language = "English (US)",
isbn = "9780819498816",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Laser-Based Micro- and Nanoprocessing VIII",
note = "Laser-Based Micro- and Nanoprocessing VIII ; Conference date: 04-02-2014 Through 06-02-2014",
}