Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process

Lisha Fan; Zhiqiang Xie; Jongbok Park; Xiangnan He; Yunshen Zhou; Y. F. Lu

doi:10.2351/1.5062205

Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process

Lisha Fan, Zhiqiang Xie, Jongbok Park, Xiangnan He, Yunshen Zhou, Y. F. Lu

Electrical & Computer Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Nitrogen (N)-doped diamond films were synthesized by resonantly exciting ammonia (NH₃) molecules in ammonia-added oxyacetylene flames. A wavelengthtunable CO₂ laser (spectrum range from 9.2 to 10.9 ∼m) was used for the resonant excitations. The NH wagging mode of the NH₃ molecules was selected to achieve the resonant excitations. Both laser wavelengths of 10.591 and 9.219 mu;m were applied to the process. Compared with 10.591 μm produced by common commercial CO2 lasers, the laser wavelength of 9.219 μm proved much more effective in resonant excitation of the NH ₃ molecules. With a 500 W laser excitation at 9.219 μm, high quality N-doped diamond films were deposited with a doping level of 1.5×10²⁰ N atoms/cm³. A morphologic transition from amorphous cauliflower structures to columnar diamond structures was.

Original language	English (US)
Pages	1217-1221
Number of pages	5
DOIs	https://doi.org/10.2351/1.5062205
State	Published - 2011
Event	30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 - Orlando, FL, United States Duration: Oct 23 2011 → Oct 27 2011

Conference

Conference	30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011
Country/Territory	United States
City	Orlando, FL
Period	10/23/11 → 10/27/11

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.2351/1.5062205

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Fan, L., Xie, Z., Park, J., He, X., Zhou, Y., & Lu, Y. F. (2011). Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process. 1217-1221. Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States. https://doi.org/10.2351/1.5062205

Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process. / Fan, Lisha; Xie, Zhiqiang; Park, Jongbok et al.
2011. 1217-1221 Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States.

Research output: Contribution to conference › Paper › peer-review

Fan, L, Xie, Z, Park, J, He, X, Zhou, Y & Lu, YF 2011, 'Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process', Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States, 10/23/11 - 10/27/11 pp. 1217-1221. https://doi.org/10.2351/1.5062205

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title = "Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process",

abstract = "Nitrogen (N)-doped diamond films were synthesized by resonantly exciting ammonia (NH3) molecules in ammonia-added oxyacetylene flames. A wavelengthtunable CO2 laser (spectrum range from 9.2 to 10.9 ∼m) was used for the resonant excitations. The NH wagging mode of the NH3 molecules was selected to achieve the resonant excitations. Both laser wavelengths of 10.591 and 9.219 mu;m were applied to the process. Compared with 10.591 μm produced by common commercial CO2 lasers, the laser wavelength of 9.219 μm proved much more effective in resonant excitation of the NH 3 molecules. With a 500 W laser excitation at 9.219 μm, high quality N-doped diamond films were deposited with a doping level of 1.5×1020 N atoms/cm3. A morphologic transition from amorphous cauliflower structures to columnar diamond structures was.",

author = "Lisha Fan and Zhiqiang Xie and Jongbok Park and Xiangnan He and Yunshen Zhou and Lu, {Y. F.}",

year = "2011",

doi = "10.2351/1.5062205",

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note = "30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 ; Conference date: 23-10-2011 Through 27-10-2011",

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T1 - Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process

AU - Fan, Lisha

AU - Xie, Zhiqiang

AU - Park, Jongbok

AU - He, Xiangnan

AU - Zhou, Yunshen

AU - Lu, Y. F.

PY - 2011

Y1 - 2011

N2 - Nitrogen (N)-doped diamond films were synthesized by resonantly exciting ammonia (NH3) molecules in ammonia-added oxyacetylene flames. A wavelengthtunable CO2 laser (spectrum range from 9.2 to 10.9 ∼m) was used for the resonant excitations. The NH wagging mode of the NH3 molecules was selected to achieve the resonant excitations. Both laser wavelengths of 10.591 and 9.219 mu;m were applied to the process. Compared with 10.591 μm produced by common commercial CO2 lasers, the laser wavelength of 9.219 μm proved much more effective in resonant excitation of the NH 3 molecules. With a 500 W laser excitation at 9.219 μm, high quality N-doped diamond films were deposited with a doping level of 1.5×1020 N atoms/cm3. A morphologic transition from amorphous cauliflower structures to columnar diamond structures was.

AB - Nitrogen (N)-doped diamond films were synthesized by resonantly exciting ammonia (NH3) molecules in ammonia-added oxyacetylene flames. A wavelengthtunable CO2 laser (spectrum range from 9.2 to 10.9 ∼m) was used for the resonant excitations. The NH wagging mode of the NH3 molecules was selected to achieve the resonant excitations. Both laser wavelengths of 10.591 and 9.219 mu;m were applied to the process. Compared with 10.591 μm produced by common commercial CO2 lasers, the laser wavelength of 9.219 μm proved much more effective in resonant excitation of the NH 3 molecules. With a 500 W laser excitation at 9.219 μm, high quality N-doped diamond films were deposited with a doping level of 1.5×1020 N atoms/cm3. A morphologic transition from amorphous cauliflower structures to columnar diamond structures was.

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Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process

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