Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process

Lisha Fan, Zhiqiang Xie, Jongbok Park, Xiangnan He, Yunshen Zhou, Y. F. Lu

Research output: Contribution to conferencePaper

Abstract

Nitrogen (N)-doped diamond films were synthesized by resonantly exciting ammonia (NH3) molecules in ammonia-added oxyacetylene flames. A wavelengthtunable CO2 laser (spectrum range from 9.2 to 10.9 ∼m) was used for the resonant excitations. The NH wagging mode of the NH3 molecules was selected to achieve the resonant excitations. Both laser wavelengths of 10.591 and 9.219 mu;m were applied to the process. Compared with 10.591 μm produced by common commercial CO2 lasers, the laser wavelength of 9.219 μm proved much more effective in resonant excitation of the NH 3 molecules. With a 500 W laser excitation at 9.219 μm, high quality N-doped diamond films were deposited with a doping level of 1.5×1020 N atoms/cm3. A morphologic transition from amorphous cauliflower structures to columnar diamond structures was.

Original languageEnglish (US)
Pages1217-1221
Number of pages5
DOIs
StatePublished - 2011
Event30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 - Orlando, FL, United States
Duration: Oct 23 2011Oct 27 2011

Conference

Conference30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011
CountryUnited States
CityOrlando, FL
Period10/23/1110/27/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Fan, L., Xie, Z., Park, J., He, X., Zhou, Y., & Lu, Y. F. (2011). Synthesis of nitrogen-doped diamond films by vibrational excitation of precursor molecules using CO2 laser in a combustion flame process. 1217-1221. Paper presented at 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011, Orlando, FL, United States. https://doi.org/10.2351/1.5062205