Temperature dependence of nanopatterning of inhomogeneously strained surfaces

M. I. Larsson, B. M. Clemens, R. F. Sabiryanov, Kyeongjae Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The temperature and deposition rate dependence of nanopattern formation on inhomogeneously strained surfaces is investigated by means of kinetic Monte Carlo simulations. This study proposes that technologically achievable strain fields (that often are less than 1%) can be used to produce high-quality nanopatterns. We predict that ordered nanopatterns can be achieved even for small surface strain-field modulations if the temperature and deposition rate are large enough. To observe this effect, the mean adatom surface diffusion length has to be more or less equal to the period of the strain field. On the other hand, for larger strain-field modulations good nanopatterning can be achieved for a wide range of growth rates, especially at low temperatures.

Original languageEnglish (US)
Title of host publication2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings
PublisherIEEE Computer Society
Number of pages4
ISBN (Electronic)0780379764
StatePublished - 2003
Event2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States
Duration: Aug 12 2003Aug 14 2003

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380


Other2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003
Country/TerritoryUnited States
CitySan Francisco


  • Capacitive sensors
  • Kinetic theory
  • Lattices
  • Materials science and technology
  • Mechanical engineering
  • Nanopatterning
  • Physics
  • Predictive models
  • Temperature dependence
  • Temperature distribution

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics


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