Abstract
In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. This paper discusses the theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2 |
| Number of pages | 2 |
| Journal | LEOS Summer Topical Meeting |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA Duration: Aug 5 1996 → Aug 9 1996 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering