Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces

W. D. Song, Y. F. Lu, M. H. Hong, T. C. Chong, T. S. Low

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. This paper discusses the theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces.

Original languageEnglish (US)
Pages (from-to)2
Number of pages1
JournalLEOS Summer Topical Meeting
StatePublished - Jan 1 1996
EventProceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA
Duration: Aug 5 1996Aug 9 1996

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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