Theoretical modeling for laser cleaning of micro-particles from solid surface

Y. F. Lu, W. D. Song, M. H. Hong, D. S.H. Chan, T. S. Low

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


In laser cleaning of micro-particles from solid surface, the adhesion force between the particles and the substrate surface and the thermal expansion of both particles and substrate play important roles in determining the threshold laser fluence. Taking Van der Waals force and cleaning force due to fast thermal expansion of particles and substrate surface induced by pulsed laser irradiation into account, a cleaning model was established for removal of tiny particles from substrate surfaces. The cleaning condition and cleaning threshold can be obtained from this model. This model can qualitatively and quantitatively predict how the laser cleaning process depending on laser incident direction, laser wavelength, particle size, particle material and substrate material. Theoretical predictions have been verified by the experimental results. Laser cleaning of micro-particle has wide applications in microelectronics and magnetic recording industries.

Original languageEnglish (US)
Pages (from-to)399-408
Number of pages10
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 3 1997

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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