Theory and Application of Generalized Ellipsometry

Research output: Chapter in Book/Report/Conference proceedingChapter

23 Scopus citations
Original languageEnglish (US)
Title of host publicationHandbook of Ellipsometry
PublisherElsevier Inc.
Pages637-717
Number of pages81
ISBN (Electronic)9780815517474
ISBN (Print)9780815514992
DOIs
StatePublished - Dec 31 2005

ASJC Scopus subject areas

  • Engineering(all)
  • Chemical Engineering(all)

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