Theory and Application of Generalized Ellipsometry

Mathias Schubert

Research output: Chapter in Book/Report/Conference proceedingChapter

33 Scopus citations
Original languageEnglish (US)
Title of host publicationHandbook of Ellipsometry
PublisherElsevier Inc.
Number of pages81
ISBN (Electronic)9780815517474
ISBN (Print)9780815514992
StatePublished - Dec 31 2005
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering
  • General Chemical Engineering

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