Original language | English (US) |
---|---|
Title of host publication | Handbook of Ellipsometry |
Publisher | Elsevier Inc. |
Pages | 637-717 |
Number of pages | 81 |
ISBN (Electronic) | 9780815517474 |
ISBN (Print) | 9780815514992 |
DOIs | |
State | Published - Dec 31 2005 |
Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)
- Chemical Engineering(all)