Theory and Application of Generalized Ellipsometry

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@inbook{3c1c82f7ab0543329d442cd8c539be87,

title = "Theory and Application of Generalized Ellipsometry",

author = "Mathias Schubert",

year = "2005",

month = dec,

day = "31",

doi = "10.1016/B978-081551499-2.50011-3",

language = "English (US)",

isbn = "9780815514992",

pages = "637--717",

booktitle = "Handbook of Ellipsometry",

publisher = "Elsevier Inc.",

}

TY - CHAP

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AU - Schubert, Mathias

PY - 2005/12/31

Y1 - 2005/12/31

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DO - 10.1016/B978-081551499-2.50011-3

M3 - Chapter

AN - SCOPUS:84882904157

SN - 9780815514992

SP - 637

EP - 717

BT - Handbook of Ellipsometry

PB - Elsevier Inc.

ER -