@inbook{3c1c82f7ab0543329d442cd8c539be87,
title = "Theory and Application of Generalized Ellipsometry",
author = "Mathias Schubert",
note = "Funding Information: The author wishes to thank many colleagues for their numerous contributions and valuable comments: C.M. Herzinger, B. Johs, C. Cramer, I. Pietzonka, E. Franke, T. Hofmann, A. Kasic, T.E. Tiwald, H. Schmiedel, and V. Gottschalch. B. Rheinl{\"a}nder and J.A. Woollam have continuously supported research presented in this Chapter. I am indebted to C.M. Herzinger, T.E. Tiwald and G.E. Jellison for critical reading of the manuscript. The author also acknowledges a former fellowship from the Studienstiftung des Deutschen Volkes. This work was in part supported under DFG grants Rh 28/1-1, Rh 28/1-2, Rh 28/3-1, and NSF grant DMI-9901510, and also by the Center for Microelectronic and Optical Materials Research at the University of Nebraska, Lincoln. ",
year = "2005",
month = dec,
day = "31",
doi = "10.1016/B978-081551499-2.50011-3",
language = "English (US)",
isbn = "9780815514992",
pages = "637--717",
booktitle = "Handbook of Ellipsometry",
publisher = "Elsevier Inc.",
}