Theory of multilayers heated by laser absorption

K. D. Cole, W. A. McGahan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

In this paper solutions of the heat conduction equation are presented for multilayer samples heated by a periodically modulated axisymmetric laser beam. The sample may contain any number of thin layers on a thick substrate. This new theory combines exact optical absorption, multilayers, contact resistance between layers, and ease of calculation. The solutions are based on a local Green's function formalism, and no approximations are made as to the form of absorption of energy in the sample from the heating laser. The method involves integral transforms (Fourier and Hankel) and the normal component of the heat fluxes across the layer boundaries can be found analytically in transform space. To calculate temperatures in real space one numerical integration is required. Temperature results are presented in the form of magnitude and phase plots at the frequency of the modulated laser beam. One application for these results is photothermal deflection experiments for the measurement of thermal conductivity in multiple films on a thick substrate. The temperature and beam deflection calculations are very efficient and can be carried out easily on a personal computer.

Original languageEnglish (US)
Title of host publicationMicromechanical Systems
PublisherPubl by ASME
Pages267-282
Number of pages16
ISBN (Print)0791810992
StatePublished - 1992
EventWinter Annual Meeting of the American Society of Mechanical Engineers - Anaheim, CA, USA
Duration: Nov 8 1992Nov 13 1992

Publication series

NameAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
Volume40

Other

OtherWinter Annual Meeting of the American Society of Mechanical Engineers
CityAnaheim, CA, USA
Period11/8/9211/13/92

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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    Cole, K. D., & McGahan, W. A. (1992). Theory of multilayers heated by laser absorption. In Micromechanical Systems (pp. 267-282). (American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC; Vol. 40). Publ by ASME.