Thermochemical dry etching of single crystal ferrite by laser irradiation in CCl4 gas atmosphere

M. Takai, Y. F. Lu, T. Koizumi, S. Namba, S. Nagatomo

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

Single crystal ferrite has been etched by focused Ar+ laser irradiation in a CCl4 gas atmosphere. The etched groove showed cracks due to thermal stresses when samples were etched by a laser vaporization process in a vacuum, while in a CCl4 atmosphere, such cracks were not observed. An etching rate of 68 μ/s obtained for a thermochemical process by laser irradiation was four orders of magnitude higher than that for a wet chemical etching process. A high aspect (depth-to-width) ratio of up to 10 was obtained for etched grooves. Under specific conditions, bending of the groove and orientation dependence in etching rate were observed.

Original languageEnglish (US)
Pages (from-to)197-205
Number of pages9
JournalApplied Physics A Solids and Surfaces
Volume46
Issue number3
DOIs
StatePublished - Jul 1988
Externally publishedYes

Keywords

  • 81.40
  • 82.65

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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