Thin-film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

S. Orzeszko, Bhola N. De, John A. Woollam, John J. Pouch, Samuel A. Alterovitz, David C. Ingram

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin-film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface-roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.

Original languageEnglish (US)
Pages (from-to)4175-4180
Number of pages6
JournalJournal of Applied Physics
Volume64
Issue number8
DOIs
StatePublished - 1988

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Thin-film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry'. Together they form a unique fingerprint.

  • Cite this