Abstract
Advanced three-dimensional (3D) micro/nano-fabrication requires both additive and subtractive fabrication processes. However, method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating the additive two-photon polymerization (TPP) and the subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures including polymer fiber Bragg grating containing periodic holes of 500-nm diameter and 3D microfluidic systems containing arrays of channels of 1-μm diameter were successfully fabricated and characterized. The combination of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone. The new fabrication method is promising for a wide range of applications including integrated optics, micro-fluidics, and microelectromechanical systems.
Original language | English (US) |
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Pages | 1160-1164 |
Number of pages | 5 |
DOIs | |
State | Published - 2012 |
Event | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States Duration: Sep 23 2012 → Sep 27 2012 |
Conference
Conference | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 |
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Country/Territory | United States |
City | Anaheim, CA |
Period | 9/23/12 → 9/27/12 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials