Three-dimensional sub-wavelength fabrication by integration of additive and subtractive femtosecond-laser direct writing

Wei Xiong, Yunshen Zhou, Xiangnan He, Yang Gao, Masoud Mahjouri-Samani, Tommaso Baldacchini, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Additive nanofabrication by two-photon polymerization (TPP) has recently drawn increased attention due to its sub-100 nm resolution and truly three-dimensional (3D) structuring capability. However, besides additive processes, subtractive process is also demanded for many 3D fabrications. Method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer fiber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of l-|im diameter. The integration of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone, which is promising for a wide range of applications including integrated optics, metamaterials, MEMS, and micro-fluidics.

Original languageEnglish (US)
Title of host publicationPrecision Polymer Materials
Subtitle of host publicationFabricating Functional Assemblies, Surfaces, Interlaces and Devices
PublisherMaterials Research Society
Pages38-43
Number of pages6
ISBN (Print)9781632660923
DOIs
StatePublished - 2013
Event2012 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 25 2012Nov 30 2012

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1499
ISSN (Print)0272-9172

Conference

Conference2012 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/25/1211/30/12

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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