Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

A. P. Malshe, K. P. Rajurkar, K. R. Virwani, C. R. Taylor, D. L. Bourell, G. Levy, M. M. Sundaram, J. A. McGeough, V. Kalyanasundaram, A. N. Samant

Research output: Contribution to journalArticlepeer-review

81 Scopus citations

Abstract

Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.

Original languageEnglish (US)
Pages (from-to)628-651
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Volume59
Issue number2
DOIs
StatePublished - 2010

Keywords

  • Manufacturing
  • Nano manufacturing
  • Tip-based nano manufacturing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Fingerprint Dive into the research topics of 'Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes'. Together they form a unique fingerprint.

Cite this