Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

A. P. Malshe; K. P. Rajurkar; K. R. Virwani; C. R. Taylor; D. L. Bourell; G. Levy; M. M. Sundaram; J. A. McGeough; V. Kalyanasundaram; A. N. Samant

doi:10.1016/j.cirp.2010.05.006

Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

A. P. Malshe, K. P. Rajurkar, K. R. Virwani, C. R. Taylor, D. L. Bourell, G. Levy, M. M. Sundaram, J. A. McGeough, V. Kalyanasundaram, A. N. Samant

Mechanical & Materials Engineering

Research output: Contribution to journal › Article › peer-review

99 Scopus citations

Abstract

Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.

Original language	English (US)
Pages (from-to)	628-651
Number of pages	24
Journal	CIRP Annals - Manufacturing Technology
Volume	59
Issue number	2
DOIs	https://doi.org/10.1016/j.cirp.2010.05.006
State	Published - 2010

Keywords

Manufacturing
Nano manufacturing
Tip-based nano manufacturing

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2010.05.006

Cite this

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title = "Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes",

abstract = "Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon {"}nanotool tips{"} applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.",

keywords = "Manufacturing, Nano manufacturing, Tip-based nano manufacturing",

author = "Malshe, {A. P.} and Rajurkar, {K. P.} and Virwani, {K. R.} and Taylor, {C. R.} and Bourell, {D. L.} and G. Levy and Sundaram, {M. M.} and McGeough, {J. A.} and V. Kalyanasundaram and Samant, {A. N.}",

note = "Funding Information: Authors wish to thank distinguished members of STC-E and CIRP, at large, for valuable suggestions in the preparation of this manuscript. Special thanks to Profs. Meijer, Kunieda and Lauwers for their technical inputs. Authors (Malshe, Rajurkar and Taylor) are thankful to CMMI-NSF for the financial support for the research related to nanoembossing, nano-EM and nanoECM.",

year = "2010",

doi = "10.1016/j.cirp.2010.05.006",

language = "English (US)",

volume = "59",

pages = "628--651",

journal = "CIRP Annals - Manufacturing Technology",

issn = "0007-8506",

publisher = "Elsevier Inc.",

number = "2",

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TY - JOUR

T1 - Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

AU - Malshe, A. P.

AU - Rajurkar, K. P.

AU - Virwani, K. R.

AU - Taylor, C. R.

AU - Bourell, D. L.

AU - Levy, G.

AU - Sundaram, M. M.

AU - McGeough, J. A.

AU - Kalyanasundaram, V.

AU - Samant, A. N.

N1 - Funding Information: Authors wish to thank distinguished members of STC-E and CIRP, at large, for valuable suggestions in the preparation of this manuscript. Special thanks to Profs. Meijer, Kunieda and Lauwers for their technical inputs. Authors (Malshe, Rajurkar and Taylor) are thankful to CMMI-NSF for the financial support for the research related to nanoembossing, nano-EM and nanoECM.

PY - 2010

Y1 - 2010

N2 - Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.

AB - Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. It is driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications-performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations.

KW - Manufacturing

KW - Nano manufacturing

KW - Tip-based nano manufacturing

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Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

Abstract

Keywords

ASJC Scopus subject areas

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