Transparent interconnections formed by rapid single-step fabrication of graphene patterns

J. B. Park; W. Xiong; Z. Q. Xie; Y. Gao; M. Qian; M. Mitchell; M. Mahjouri-Samani; Y. S. Zhou; L. Jiang; Y. F. Lu

doi:10.1063/1.3622660

Transparent interconnections formed by rapid single-step fabrication of graphene patterns

J. B. Park, W. Xiong, Z. Q. Xie, Y. Gao, M. Qian, M. Mitchell, M. Mahjouri-Samani, Y. S. Zhou, L. Jiang, Y. F. Lu

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We developed a process to form transparent interconnections using graphene patterns that were synthesized by laser chemical vapor deposition. The number of graphene layers was tightly controlled by laser scan speed. Graphene patterns were fabricated at a high scan speed of up to 200 m/s with a single-step process. The process time is about a million times faster than the conventional chemical vapor deposition method. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for graphene-based interconnections.

Original language	English (US)
Article number	053103
Journal	Applied Physics Letters
Volume	99
Issue number	5
DOIs	https://doi.org/10.1063/1.3622660
State	Published - Aug 1 2011

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3622660

Cite this

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title = "Transparent interconnections formed by rapid single-step fabrication of graphene patterns",

abstract = "We developed a process to form transparent interconnections using graphene patterns that were synthesized by laser chemical vapor deposition. The number of graphene layers was tightly controlled by laser scan speed. Graphene patterns were fabricated at a high scan speed of up to 200 m/s with a single-step process. The process time is about a million times faster than the conventional chemical vapor deposition method. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for graphene-based interconnections.",

author = "Park, {J. B.} and W. Xiong and Xie, {Z. Q.} and Y. Gao and M. Qian and M. Mitchell and M. Mahjouri-Samani and Zhou, {Y. S.} and L. Jiang and Lu, {Y. F.}",

note = "Funding Information: This research work was financially supported by the National Science Foundation (CMMI 0758199 and CMMI 0852729), the Nebraska Research Initiative, and the Nebraska Center for Energy Science Research. ",

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T1 - Transparent interconnections formed by rapid single-step fabrication of graphene patterns

AU - Park, J. B.

AU - Xiong, W.

AU - Xie, Z. Q.

AU - Gao, Y.

AU - Qian, M.

AU - Mitchell, M.

AU - Mahjouri-Samani, M.

AU - Zhou, Y. S.

AU - Jiang, L.

AU - Lu, Y. F.

N1 - Funding Information: This research work was financially supported by the National Science Foundation (CMMI 0758199 and CMMI 0852729), the Nebraska Research Initiative, and the Nebraska Center for Energy Science Research.

PY - 2011/8/1

Y1 - 2011/8/1

N2 - We developed a process to form transparent interconnections using graphene patterns that were synthesized by laser chemical vapor deposition. The number of graphene layers was tightly controlled by laser scan speed. Graphene patterns were fabricated at a high scan speed of up to 200 m/s with a single-step process. The process time is about a million times faster than the conventional chemical vapor deposition method. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for graphene-based interconnections.

AB - We developed a process to form transparent interconnections using graphene patterns that were synthesized by laser chemical vapor deposition. The number of graphene layers was tightly controlled by laser scan speed. Graphene patterns were fabricated at a high scan speed of up to 200 m/s with a single-step process. The process time is about a million times faster than the conventional chemical vapor deposition method. The fabricated graphene patterns on nickel foils were directly transferred to desired positions on patterned electrodes. The position-controlled transfer with rapid single-step fabrication of graphene patterns provides an innovative pathway for graphene-based interconnections.

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Transparent interconnections formed by rapid single-step fabrication of graphene patterns

Abstract

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