Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering

K. J. Yi, Y. F. Lu, H. Ling

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

We report an apparatus designed to characterize two-dimensional (2D) surfaces of carbon films based on the principle of inelastic light scattering (Raman scattering). The design and construction details are presented. The system with a backscattering configuration, is constructed using a high power argon ion laser with a wavelength of 514.5 nm, an XYZ motorized stage with a step resolution of 3.175 μm, a microscope objective lens, a confocal spatial filter and a holographic notch filter, to achieve extremely low crosstalk and maximum resolution in spectroscopy. The radial resolution for film surface is much enhanced by confocal spatial filter due to its stray light suppression capability. A large depth of sampling field is achieved using an objective lens with a middle NA of 0.55 and a long working distance of 8 mm, thus the requirement of using auto-focusing can be avoided. A specific algorithm is designed to decide the film boundaries as well as the outline of surface structures from pre-defined spectral windows. Control software on Labview™ platform has been developed for controlling movement of the sample stage, spectral acquisition and data visualization. Single-walled carbon nanotubes (SWCNTs) and patterned silicon were used to evaluate the sensitivity, ID profile and 2D mapping functionality of the designed system. Diamond-like amorphous carbon (DLC) films prepared by pulsed-laser deposition (PLD) were studied using the developed instrument. The results from this approach are compared with those using general scanning tunneling microscope (STM). This comparable low-cost system with high performance is suitable to characterize semiconductors and other materials both for industrial applications and academic research.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6107
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micropackaging
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

Keywords

  • Carbon films
  • Confocal spatial filter
  • Raman mapping
  • Raman scattering
  • Surface characterization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Yi, K. J., Lu, Y. F., & Ling, H. (2006). Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering. In Proceedings of SPIE - The International Society for Optical Engineering [61070O] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107). https://doi.org/10.1117/12.644974