Understanding behavior of machining interface and dielectric molecular medium in nanoscale electro-machining

V. Kalyanasundaram, K. R. Virwani, D. E. Spearot, A. P. Malshe, K. P. Rajurkar

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Recently, a repeatable and scalable nanoscale electro-machining (nano-EM) process to produce sub-20 nm scale features has been demonstrated. In the presented research, the behavior of the liquid dielectric (n-decane) machining medium in nano-confinement (<3 nm) under physical boundary conditions is investigated using molecular dynamics (MD) simulation. Results show a four-fold increase in the density of n-decane indicating 'quasi-solid' behavior at the nano-EM interface, thereby acting as an effective charge transport medium between the nano-tool and the workpiece. The effect of such quasi-solid medium is demonstrated through the experimental observations of electrical breakdown (BD) at the sub-20 nm scale interface.

Original languageEnglish (US)
Pages (from-to)199-202
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume57
Issue number1
DOIs
StatePublished - 2008

Keywords

  • Electrical discharge machining
  • Nanoscale electrical breakdown
  • Simulation

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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