Understanding dielectric breakdown and related tool wear characteristics in nanoscale Electro-Machining process

K. R. Virwani, A. P. Malshe, K. P. Rajurkar

Research output: Contribution to journalArticle

18 Scopus citations

Abstract

To address the need to produce sub-50 nm scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (∼20nm after in comparison with ∼35nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.

Original languageEnglish (US)
Pages (from-to)217-220
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume56
Issue number1
DOIs
StatePublished - 2007

Keywords

  • Electrical discharge machining
  • Nanomanufacturing
  • Scanning tunneling microscope

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Fingerprint Dive into the research topics of 'Understanding dielectric breakdown and related tool wear characteristics in nanoscale Electro-Machining process'. Together they form a unique fingerprint.

  • Cite this