Abstract
To address the need to produce sub-50 nm scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (∼20nm after in comparison with ∼35nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.
Original language | English (US) |
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Pages (from-to) | 217-220 |
Number of pages | 4 |
Journal | CIRP Annals - Manufacturing Technology |
Volume | 56 |
Issue number | 1 |
DOIs | |
State | Published - 2007 |
Keywords
- Electrical discharge machining
- Nanomanufacturing
- Scanning tunneling microscope
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering