Understanding repeatability in nanoscale electro-machining process

Valliappa Kalyanasundaram, Kumar R. Virwani, Douglas E. Spearot, Kamlakar P. Rajurkar, Ajay P. Malshe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The consistency of the features machined by the recently developed nanoscale electromachining process (nano-EM) on the scanning tunneling microscope (STM) platform depends on the quality of the tools used. A simple, fast and reliable method has been developed in situ to evaluate nano-EM tool quality using current-displacement (I-Z) spectroscopy curves. Using this quality criterion and High Resolution Transmission Electron Microscopy (HR-TEM), the "health" of nano-EM tools was analyzed before and after machining for wear studies and their subsequent usability. From a manufacturing scalability perspective, it is imperative that this novel machining process demonstrates good repeatability. A repeatability study of the performance of nano-EM was carried out for the first time using different nano-tools and forms the basis of this research. It was found that the spread of the features in X, Y and Z dimensions was <20%, which implies that nano-EM has the potential to be a commercial nanomanufacturing process.

Original languageEnglish (US)
Title of host publicationTransactions of the North American Manufacturing Research Institution of SME - Paper Presented at NAMRC 36
Pages145-152
Number of pages8
StatePublished - 2008
EventTransactions of the North American Manufacturing Research Institution of SME - Monterrey, Mexico
Duration: May 20 2008May 23 2008

Publication series

NameTransactions of the North American Manufacturing Research Institution of SME
Volume36
ISSN (Print)1047-3025

Conference

ConferenceTransactions of the North American Manufacturing Research Institution of SME
CountryMexico
CityMonterrey
Period5/20/085/23/08

Keywords

  • Nanomanufacturing repeatability
  • Nanoscale electro-machining
  • Nanotool analysis
  • Scanning probe microscopy (SPM)
  • Tip-based nanomanufacturing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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