TY - GEN
T1 - Understanding repeatability in nanoscale electro-machining process
AU - Kalyanasundaram, Valliappa
AU - Virwani, Kumar R.
AU - Spearot, Douglas E.
AU - Rajurkar, Kamlakar P.
AU - Malshe, Ajay P.
PY - 2008
Y1 - 2008
N2 - The consistency of the features machined by the recently developed nanoscale electromachining process (nano-EM) on the scanning tunneling microscope (STM) platform depends on the quality of the tools used. A simple, fast and reliable method has been developed in situ to evaluate nano-EM tool quality using current-displacement (I-Z) spectroscopy curves. Using this quality criterion and High Resolution Transmission Electron Microscopy (HR-TEM), the "health" of nano-EM tools was analyzed before and after machining for wear studies and their subsequent usability. From a manufacturing scalability perspective, it is imperative that this novel machining process demonstrates good repeatability. A repeatability study of the performance of nano-EM was carried out for the first time using different nano-tools and forms the basis of this research. It was found that the spread of the features in X, Y and Z dimensions was <20%, which implies that nano-EM has the potential to be a commercial nanomanufacturing process.
AB - The consistency of the features machined by the recently developed nanoscale electromachining process (nano-EM) on the scanning tunneling microscope (STM) platform depends on the quality of the tools used. A simple, fast and reliable method has been developed in situ to evaluate nano-EM tool quality using current-displacement (I-Z) spectroscopy curves. Using this quality criterion and High Resolution Transmission Electron Microscopy (HR-TEM), the "health" of nano-EM tools was analyzed before and after machining for wear studies and their subsequent usability. From a manufacturing scalability perspective, it is imperative that this novel machining process demonstrates good repeatability. A repeatability study of the performance of nano-EM was carried out for the first time using different nano-tools and forms the basis of this research. It was found that the spread of the features in X, Y and Z dimensions was <20%, which implies that nano-EM has the potential to be a commercial nanomanufacturing process.
KW - Nanomanufacturing repeatability
KW - Nanoscale electro-machining
KW - Nanotool analysis
KW - Scanning probe microscopy (SPM)
KW - Tip-based nanomanufacturing
UR - http://www.scopus.com/inward/record.url?scp=52349084513&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52349084513&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:52349084513
SN - 0872638618
SN - 9780872638617
T3 - Transactions of the North American Manufacturing Research Institution of SME
SP - 145
EP - 152
BT - Transactions of the North American Manufacturing Research Institution of SME - Paper Presented at NAMRC 36
T2 - Transactions of the North American Manufacturing Research Institution of SME
Y2 - 20 May 2008 through 23 May 2008
ER -