Understanding the material removal process and heat-affected zone in nano-metric electro-machining of graphene

Muhammad P. Jahan, Ajay P. Malshe, Kamlakar P. Rajurkar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The fabrication of nano features in different functional materials - such as gold, graphene, carbon nano-tubes, and quantum dots - can open up the possibility of using them more comprehensively in micro/nano electromechanical systems (MEMS/NEMS) applications. This paper presents a feasibility investigation of fabricating nano-holes in graphene with a focus on machining at an atomic scale. The nano-metric material removal mechanism and the formation of a heat-affected zone (HAZ) due to the electro-machining (EM) process are discussed. It is demonstrated that nano-EM in a liquid dielectric medium (n-decane) is capable of fabricating features as small as 3 to 4 nm with a visible atomic arrangement of carbon in graphene. Nano-features of 5 to 6 nm can be machined consistently with excellent repeatability using the nano-EM process. As an electro-thermal machining process, nano-EM generates HAZ and results in the deposition of materials at the edge of the machined nano-holes. The dimensions of both the nano-features and HAZ increase with the increase of bias voltage and pulse duration. Gradual reconstruction of carbon lattices at the edge of the nano-holes, and thus a change in the profile of the nano-holes, are subsequently observed. Finally, it is established that batch mode nano-holes can be machined on a graphene surface using the nano-EM process, thus making the process suitable for scale-up applications.

Original languageEnglish (US)
Title of host publication41st North American Manufacturing Research Conference 2013 - Transactions of the North American Manufacturing Research Institution of SME, NAMRC 2013
Pages85-94
Number of pages10
StatePublished - 2013
Event41st North American Manufacturing Research Conference 2013, NAMRC 2013 - Madison, WI, United States
Duration: Jun 10 2013Jun 14 2013

Publication series

NameTransactions of the North American Manufacturing Research Institution of SME
Volume41
ISSN (Print)1047-3025

Conference

Conference41st North American Manufacturing Research Conference 2013, NAMRC 2013
CountryUnited States
CityMadison, WI
Period6/10/136/14/13

Keywords

  • Graphene
  • Heat-affected zone
  • Material removal mechanism
  • Nano-electro machining
  • Nano-holes

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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