Variable angle of incidence spectroscopic ellipsometry: Application to GaAs-AlxGa1-xAs multiple heterostructures

Paul G. Snyder, Martin C. Rost, George H. Bu-Abbud, John A. Woollam, Samuel A. Alterovitz

Research output: Contribution to journalArticlepeer-review

105 Scopus citations


The sensitivity of spectroscopic ellipsometry data to multilayer model parameters is shown to be a strong function of the angle of incidence. A quantitative study of sensitivity versus angle of incidence is performed for a GaAs-AlxGa1-xAs-GaAs substrate structure, showing that maximum sensitivity to layer thicknesses and AlGaAs composition occurs near the wavelength-dependent principal angle. These results are verified by experimental measurements on two molecular-beam epitaxy grown samples. New spectral features, not found in previous ellipsometry studies of similar structures, are also reported.

Original languageEnglish (US)
Pages (from-to)3293-3302
Number of pages10
JournalJournal of Applied Physics
Issue number9
StatePublished - 1986

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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