VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.

Samuel A. Alterovitz, John A. Woollam, Paul G. Snyder

Research output: Contribution to specialist publicationArticle

45 Scopus citations

Abstract

Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.

Original languageEnglish (US)
Pages99-102
Number of pages4
Volume31
No3
Specialist publicationSolid State Technology
StatePublished - Mar 1988
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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