VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.

Samuel A. Alterovitz; John A. Woollam; Paul G. Snyder

VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.

Samuel A. Alterovitz, John A. Woollam, Paul G. Snyder

Research output: Contribution to specialist publication › Article

Abstract

Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.

Original language	English (US)
Pages	99-102
Number of pages	4
Volume	31
No	3
Specialist publication	Solid State Technology
State	Published - Mar 1988
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Cite this

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abstract = "Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.",

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year = "1988",

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AU - Snyder, Paul G.

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N2 - Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.

AB - Null ellipsometry and automated ellipsometry at a single wavelength are established technologies but limited in their range of application. In comparison, spectroscopic ellipsometry at fixed angle and, in the past few years, variable angle spectroscopic ellipsometry (VASE) are powerful analytical tools for the investigation of surfaces, chemical interfaces, semiconductor heterojunctions, quantum well structures, and optoelectronic materials.

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VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY.

Abstract

ASJC Scopus subject areas

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