Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

K. B. Rodenhausen; M. Schubert

doi:10.1016/j.tsf.2010.11.079

Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

K. B. Rodenhausen, M. Schubert

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM-D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM-D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction n_o) and density (ρ_o) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.

Original language	English (US)
Pages (from-to)	2772-2776
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	9
DOIs	https://doi.org/10.1016/j.tsf.2010.11.079
State	Published - Feb 28 2011

Keywords

Organic thin films
Quartz crystal microbalance
Spectroscopic ellipsometry

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2010.11.079

Cite this

@article{c91b9594dee54a189ac3919492f516df,

title = "Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods",

abstract = "Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM-D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM-D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction no) and density (ρo) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.",

keywords = "Organic thin films, Quartz crystal microbalance, Spectroscopic ellipsometry",

author = "Rodenhausen, {K. B.} and M. Schubert",

note = "Funding Information: The authors gratefully acknowledge financial support by The Procter & Gamble Company , the Nebraska NSF-EPSCoR office , the J.A. Woollam Co., Inc. , and the University of Nebraska-Lincoln College of Engineering . We acknowledge fruitful discussions with Mark Solinsky and Matthew Wagner (The Procter & Gamble Company), Fredrik H{\"o}{\"o}k (Chalmers University), Hans Arwin (Link{\"o}ping University), and Thomas E. Tiwald (J. A. Woollam Co., Inc.).",

year = "2011",

month = feb,

day = "28",

doi = "10.1016/j.tsf.2010.11.079",

language = "English (US)",

volume = "519",

pages = "2772--2776",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "9",

}

TY - JOUR

T1 - Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

AU - Rodenhausen, K. B.

AU - Schubert, M.

N1 - Funding Information: The authors gratefully acknowledge financial support by The Procter & Gamble Company , the Nebraska NSF-EPSCoR office , the J.A. Woollam Co., Inc. , and the University of Nebraska-Lincoln College of Engineering . We acknowledge fruitful discussions with Mark Solinsky and Matthew Wagner (The Procter & Gamble Company), Fredrik Höök (Chalmers University), Hans Arwin (Linköping University), and Thomas E. Tiwald (J. A. Woollam Co., Inc.).

PY - 2011/2/28

Y1 - 2011/2/28

N2 - Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM-D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM-D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction no) and density (ρo) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.

AB - Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM-D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM-D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction no) and density (ρo) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.

KW - Organic thin films

KW - Quartz crystal microbalance

KW - Spectroscopic ellipsometry

UR - http://www.scopus.com/inward/record.url?scp=79952630539&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952630539&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.11.079

DO - 10.1016/j.tsf.2010.11.079

M3 - Article

AN - SCOPUS:79952630539

SN - 0040-6090

VL - 519

SP - 2772

EP - 2776

JO - Thin Solid Films

JF - Thin Solid Films

IS - 9

ER -

Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this