TY - JOUR
T1 - VUV and IR spectroellipsometric studies of polymer surfaces
AU - Woollam, John A.
AU - Bungay, Corey
AU - Hilfiker, James
AU - Tiwald, Tom
N1 - Funding Information:
Space Research was sponsored by NASA Glenn, grant NAG32219. Infrared applications were supported by National Science Foundation contract DMI-9901510.
PY - 2003/8
Y1 - 2003/8
N2 - This article reviews applications of spectroscopic ellipsometry (SE) in polymers and irradiated polymers. SE has long been used to determine optical constants, layer thicknesses in multi-layer stacks and microstructure (voids, alloy fraction, or mixed phase composition). Modern spectroscopic ellipsometers now cover a range from 140 nm (≈9 eV) in the vacuum ultraviolet to 100 μm (100 cm-1) in the far infrared. Examples of ellipsometric measurements for irradiated and un-irradiated thin film and bulk polymers, and biological materials are presented. Analysis yields index of refraction and dispersion, optical absorption and optical anisotropy as studied by "generalized ellipsometry". Both ex situ and in situ ellipsometry are discussed, as are future trends and opportunities.
AB - This article reviews applications of spectroscopic ellipsometry (SE) in polymers and irradiated polymers. SE has long been used to determine optical constants, layer thicknesses in multi-layer stacks and microstructure (voids, alloy fraction, or mixed phase composition). Modern spectroscopic ellipsometers now cover a range from 140 nm (≈9 eV) in the vacuum ultraviolet to 100 μm (100 cm-1) in the far infrared. Examples of ellipsometric measurements for irradiated and un-irradiated thin film and bulk polymers, and biological materials are presented. Analysis yields index of refraction and dispersion, optical absorption and optical anisotropy as studied by "generalized ellipsometry". Both ex situ and in situ ellipsometry are discussed, as are future trends and opportunities.
KW - Depth profiles
KW - Infrared spectroscopic ellipsometry
KW - Optical anisotropy
KW - Polymers
KW - Vacuum ultraviolet
KW - Visible
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U2 - 10.1016/S0168-583X(03)00983-2
DO - 10.1016/S0168-583X(03)00983-2
M3 - Conference article
AN - SCOPUS:0038825335
SN - 0168-583X
VL - 208
SP - 35
EP - 39
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
T2 - Ionizing Radiation and Polymers
Y2 - 21 September 2002 through 26 September 2002
ER -