VUV and IR spectroellipsometric studies of polymer surfaces

John A. Woollam, Corey Bungay, James Hilfiker, Tom Tiwald

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations


This article reviews applications of spectroscopic ellipsometry (SE) in polymers and irradiated polymers. SE has long been used to determine optical constants, layer thicknesses in multi-layer stacks and microstructure (voids, alloy fraction, or mixed phase composition). Modern spectroscopic ellipsometers now cover a range from 140 nm (≈9 eV) in the vacuum ultraviolet to 100 μm (100 cm-1) in the far infrared. Examples of ellipsometric measurements for irradiated and un-irradiated thin film and bulk polymers, and biological materials are presented. Analysis yields index of refraction and dispersion, optical absorption and optical anisotropy as studied by "generalized ellipsometry". Both ex situ and in situ ellipsometry are discussed, as are future trends and opportunities.

Original languageEnglish (US)
Pages (from-to)35-39
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number1-4
StatePublished - Aug 2003
EventIonizing Radiation and Polymers - Sainte-Adele, QUE, Canada
Duration: Sep 21 2002Sep 26 2002


  • Depth profiles
  • Infrared spectroscopic ellipsometry
  • Optical anisotropy
  • Polymers
  • Vacuum ultraviolet
  • Visible

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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