Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

S. H. Liou, M. Hong, J. Kwo, B. A. Davidson, H. S. Chen, S. Nakahara, T. Boone, R. J. Felder

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y 2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.

Original languageEnglish (US)
Pages (from-to)1735-1737
Number of pages3
JournalApplied Physics Letters
Volume52
Issue number20
DOIs
StatePublished - 1988
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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